PORTLAND, Ore.--(BUSINESS WIRE)--Electro Scientific Industries, Inc. (Nasdaq: ESIO), an innovator in laser-based manufacturing solutions for the microtechnology industry, today announced that Richard H. Wills has been appointed Chairman of the Board of Directors, replacing Jon Tompkins. Mr. Tompkins’ term as a director expires at the August 2015 annual meeting, and he is prohibited from being elected as a director for another term due to the age limitations in the Company's Corporate Governance